P. PURWANTO; YUNASFI; SALIM MUSTOFA. Fabrikasi Lapisan Tipis C-Cr pada Permukaan Si dengan Menggunakan Metode Sputtering. Majalah Ilmiah Pengkajian Industri; Journal of Industrial Research and Innovation, [S. l.], v. 8, n. 3, p. 101–106, 2023. DOI: 10.29122/mipi.v8i3.3664. Disponível em: https://ejournal.brin.go.id/MIPI/article/view/1507. Acesso em: 22 dec. 2024.