KARAKTERISASI SIFAT LISTRIK DAN MAGNET LAPISAN TIPIS Fe-C/Si SETELAH IRADIASI IONAr+
DOI:
https://doi.org/10.17146/jsmi.2015.16.4.4218Keywords:
Lapisan tipis Fe-C/Si, Radiasi ion, Konduktivitas, Kapasitansi, MagnetoresistanceAbstract
Telah dilakukan karakterisasi sifat listrik dan magnet lapisan tipis Fe-C/Si setelah iradiasi ion Ar+. Lapisan tipis Fe-C/Si diiradiasi dengan ion Ar+ pada dosis antara 1 × 1016 sampai 5 × 1017 ion/cm2. Hasil pengamatan morfologi permukaan lapisan tipis dengan Scanning ElectronMicroscope (SEM) memperlihatkan permukaan yang halus dan rata dengan terdeposisikan secara homogen di atas substrat Si (100). Pengamatan penampang lintang dengan SEM menunjukkan terbentuknya lapisan tipis Fe-C di atas permukaan substrat Si(100). Hasil pengukuran sifat listrik dan sifat magnet lapisan tipis Fe-C/Si menunjukkan bahwa nilai konduktansi (G), kapasitansi (C) dan nisbah magnetoresistance (MR) meningkat akibat pengaruh iradiasi ion Ar+ dan nilai nilai ini semakinmeningkat seiring dengan penambahan dosis radiasi.Dengan demikian, radiasi ionAr+berpotensi diaplikasikan di bidang elektromagnetik karena dapat meningkatkan sifat listrik dan magnet bahan.
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