PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr0.525Ti0.475O3 ) METAL FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR
DOI:
https://doi.org/10.17146/jsmi.2005.6.3.4848Keywords:
PbZr0.525Ti0.475O3 Thin Films, Lapisan Tipis PbZr0.525Ti0.475O3, Metode CSD, CSD Method, Kapasitor Logam-Feroelektrik-Logam, Koefisien Piroelektrik, Sensor IR, Metal-Ferroelectric-Metal Capacitor, IR Sensor, Pyroelectric CoefficientAbstract
SIFAT PIROELEKTRIK KAPASITOR LOGAM-FEROELEKTRIK-LOGAM TIMBAL ZIRKONIUM TITANAT (PbZr0,525Ti0,475O3) DAN APLIKASINYA UNTUK SENSOR IR. Telah diteliti lapisan tipis timbal zirconium titanat (PbZr0,525Ti0,475O3) telah disiapkan pada substrat Pt(200)/SiO2/Si(100) dengan menggunakan metode deposisi larutan kimia (CSD) untuk larutan 0,5 M. Film ini ditumbuhkan dengan spin coating pada kecepatan putar 2500 rpm, 3000 rpm, 3500 rpm selama 30 detik, dan anneal pada 750°C selama 3 jam. Pengamatan difraksi sinar-x (XRD), sifat-sifat piroelektrik dilakukan untuk melihat sifat-sifat film. Lapisan tipis ini menunjukkan struktur tetragonal dengan parameter kisi a = b = 4,141 Å, c = 3,828 Å. Responsivitas tegangan (rv) yang diukur pada frekuensi pemotong 2000 Hz dan panjang gelombang 947 nm adalah antara 32,7 μV/W sampai dengan 44,9 μV/W. Sementara itu, koefisien piroelektrik (p) dalam jangkauan 5,01 x 10-4 C/m2K sampai dengan 6,88 x 10-4 C/m2K untuk lapisan tipis PZT. Hasil-hasil ini menunjukkan bahwa lapisan tipis PZT sangat memadai sebagai sensor IR piroelektrik.
ABSTRACT
PYROELECTRIC PROPERTIES OF LEAD ZIRCONIUM TITANATE (PbZr0.525Ti0.475O3) METAL-FERROELECTRIC-METAL CAPACITOR AND ITS APPLICATION FOR IR SENSOR. Thin films lead zirconium titanate (PbZr0.525Ti0.475O3) prepared on Pt(200)/SiO2/Si(100) substrates using chemical solution deposition (CSD) method for 0.5 M solution have been investigated. The films were grown by spin coating at 2500, 3000, 3500 rpm for 30 seconds, and then annealing at 750°C for 3 hours. X-ray diffraction (XRD), pyroelectric properties observation were employed to characterize the grown films. The film shows tetragonal structure with lattice constants are a = b = 4.141 Å, c = 3.828 Å. The voltage responsivity (rv) measured at chopper frequency of 2000 Hz and at wavelength of 947 nm are between 32.7-44.9 μV/W. Meanwhile, the pyroelectric coefficient (p) are in the range of 5.01 x 10-4-6.88 x 10-4 C/m2K for PZT thin films. These results show that PZT thin films are suitable for use as a pyroelectric IR sensor.
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