STUDY OF COMPOSITION AND HOMOGENITY OF Ni80Fe20 PERMALLOY IN THE FORM OF TARGET AND THIN FILM AS MATERIALS OF MAGNETIC SENSORS

Abstract

STUDI KOMPOSISI AND HOMOGENITAS PERMALLOY Ni80Fe20 DALAM BENTUK TARGET DAN LAPISAN TIPIS SEBAGAI BAHAN DASAR SENSOR MAGNET. Telah berhasil dilakukan pembuatan bahan paduan ferromagnetic permalloy Ni80Fe20. Bahan Tersebut digunakan sebagai bahan target dalam proses pendeposisian lapisan tipis magnetik dengan metode sputtering. Karakterisasi yang mencakup analisis difraktogram XRF dan XRD membenarkan dugaan telah terbentuk paduan tersebut. Dari hasil analisis XRF bahwa perbandingan target telah sesuai dengan perhitungan. Hasil lapisan tipis juga telah terbukti sesuai dengan target. Sedangkan dari analisis XRD menunjukkan bahwa pada target dan lapisan tipis telah terbentuk permalloy Ni80Fe20, ini nampak adanya puncak pada sudut 2θ = 44,4°, dengan orientasi bidang hkl (111) yang merupakan bidang hkl dari Ni80Fe20. Terlihat pula adanya puncak lain pada sudut 2θ = 37° disinyalir sebagai oksida ferosik (ferrosic oxide) Fe3O4. Oksida yang bersifat magnetik ini terbentuk saat target dipanaskan pada suhu 350°C-400°C di udara bebas.

ABSTRACT

STUDY OF COMPOSITION AND HOMOGENITY OF Ni80Fe20PERMALLOY IN THE FORM OF TARGET AND THIN FILM AS MATERIALS OF MAGNETIC SENSORS. Material fabrication of a ferromagnetic permalloy Ni80Fe20 has successfully been done. The sample was used as a target in magnetic thin film deposition by the sputtering method. The corresponding characterization including spectral analysis with XRF and XRD supports the prediction that the permalloy has been formed. The XRF analysis result shows that the ratio of the target has good agreement with the calculation. The thin film produced by sputtering gave the same characteristic as the target. From the XRD analysis it was shown that Ni80Fe20 permalloy was formed in the target and thin film, they were shown with the peak at the angle of 2θ = 44,4°, at a (111) plane orientation as the hkl plane from Ni80Fe20. There is another peak at the angle 2θ = 37° that was estimated to be ferrosic oxide Fe3O4. This magnetic oxide was formed when the target had been heated at the temperature 350°C-400°C in the free air.